An automatic X-Y scanning controller for laser annealing of ion-implanted semiconductors
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,General Engineering,General Materials Science,Instrumentation
Link
http://stacks.iop.org/0022-3735/15/i=7/a=003/pdf
Reference6 articles.
1. A laser‐scanning apparatus for annealing of ion‐implantation damage in semiconductors
2. Light‐flash induced metallic silicides from titanium films on silicon
Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Comparisons of vacuum surface effects on commercial photodiodes: spatial response uniformity via a computerized laser scanning system;Applied Optics;1987-01-01
2. Microcomputer-controlled scanning of a laser beam at constant speed;Journal of Physics E: Scientific Instruments;1984-05
3. A microcomputer-controlled X-Y translator for CNC laser applications;Optics & Laser Technology;1984-04
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