Aluminum hard mask technique for the fabrication of high quality submicron Nb/Al–AlOx/Nb Josephson junctions-Reference-Cited by-同舟云学术

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Aluminum hard mask technique for the fabrication of high quality submicron Nb/Al–AlOx/Nb Josephson junctions

Published:2010-12-23 Issue:3 Volume:24 Page:035005
ISSN:0953-2048
Container-title:Superconductor Science and Technology
language:
Short-container-title:Supercond. Sci. Technol.

Author:

Kaiser Ch,Meckbach J M,Ilin K S,Lisenfeld J,Schäfer R,Ustinov A V,Siegel M

Publisher

IOP Publishing

Subject

Materials Chemistry,Electrical and Electronic Engineering,Metals and Alloys,Condensed Matter Physics,Ceramics and Composites

Reference26 articles.

1. RHEA (resist-hardened etch and anodization) process for fine-geometry Josephson junction fabrication

2. SNS and SIS Josephson junctions with dimensions down to the submicron region prepared by a unified technology

3. Sub‐μm, planarized, Nb‐AlOx‐Nb Josephson process for 125 mm wafers developed in partnership with Si technology

4. Novel method for fabricating deep submicron Nb/AlO/sub x//Nb tunnel junctions based on spin-on glass planarization

5. Fabrication of SIS junctions for space borne submillimeter wave mixers using negative resist e-beam lithography

Cited by 13 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Comparing Adiabatic Quantum Computers for satellite images feature extraction;Future Generation Computer Systems;2024-10

2. Anodization-free fabrication process for high-quality cross-type Josephson tunnel junctions based on a Nb/Al-AlO_x/Nb trilayer;Superconductor Science and Technology;2024-07-08

3. Improved coherence in optically defined niobium trilayer-junction qubits;Physical Review Applied;2024-02-23

4. Optimization of Nb/Al-AlO _x /Nb Josephson junctions through wafer-scale anodic oxidation: a systematic characterization and performance analysis;Superconductor Science and Technology;2023-08-24

5. Investigation of Microwave Loss Induced by Oxide Regrowth in High- Q Niobium Resonators;Physical Review Applied;2021-07-08

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