Large area planar plasma sustained by surface microwave
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Link
https://iopscience.iop.org/article/10.1088/1009-1963/16/12/029/pdf
Reference13 articles.
1. Gegeneration of a Microwave Plasma Using Traveling Waves
2. Optical emission patterns and microwave field distributions in a cylindrical microwave plasma source
3. Scaling of microwave slot antenna (SLAN): a concept for efficient plasma generation
4. Large-area high-density plasma excitation using standing pure and hybrid surface waves
5. Multiple eigenmode analysis and density jumps in planar surface-wave plasmas with slot-antenna excitation
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1. Particle-in-cell simulation on surface-wave discharge process influenced by gas pressure and negative-biased voltage along ion sheath layer;Acta Physica Sinica;2014
2. PIC/MCC simulation of the ionization process of SWP influenced by gas pressure and SPP;Acta Physica Sinica;2013
3. The current status of surface wave plasma source development;Acta Physica Sinica;2012
4. A numerical simulation of surface wave excitation in a rectangular planar-type plasma source;Chinese Physics B;2009-07-31
5. Improving the uniformity of RF-plasma density by a humped variable-gap spiral antenna;Chinese Physics B;2008-11
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