Differential and partial ionization cross sections for electron impact ionization of plasma processing molecules: CF4and PF5
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics,Mathematical Physics,Atomic and Molecular Physics, and Optics
Link
http://stacks.iop.org/1402-4896/77/i=5/a=055304/pdf
Reference27 articles.
1. Atomic and Molecular Processes in Fusion Edge Plasmas
2. Electron Interactions with CF4
3. Electron Interactions With Plasma Processing Gases: An Update for CF4, CHF3, C2F6, and C3F8
4. Absolute partial and total electron impact ionization cross sections for CF4 from threshold up to 180 eV
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