Laser-assisted chemical vapor deposition of nickel and laser cutting in integrated circuit restructuring
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics,Mathematical Physics,Atomic and Molecular Physics, and Optics
Link
http://stacks.iop.org/1402-4896/1997/i=T69/a=056/pdf
Reference9 articles.
1. Production Applications Of Laser Microchemistry
2. Laser Direct Writing for VLSI* *This work was supported by the Defense Advanced Research Projects Agency, the Department of the Air Force (in part under a specific program sponsored by the Air Force Office of Scientific Research), and the Army Research Office.
3. Continuous-wave laser-assisted fabrication of microstructures in silicon microelectronics
4. Combined experimental and modeling studies of laser‐assisted chemical vapor deposition of copper from copper(I)‐hexafluoroacetylacetonate trimethylvinylsilane
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