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Beam geometry, alignment, and wavefront aberration effects on interferometric differential wavefront sensing

  • Published:2015-10-27 Issue:12 Volume:26 Page:125203
  • ISSN:0957-0233
  • Container-title:Measurement Science and Technology
  • language:
  • Short-container-title:Meas. Sci. Technol.

Author:

Yu Xiangzhi,Gillmer S R,Ellis J D

Funder

National Institute of Standards and Technology

Division of Industrial Innovation and Partnerships

Division of Civil, Mechanical and Manufacturing Innovation

Publisher

IOP Publishing

Subject

Applied Mathematics,Instrumentation,Engineering (miscellaneous)

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