A multi-electrode plane capacitive sensor for displacement measurements and attitude controls
Author:
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Reference11 articles.
1. A two-dimensional capacitive position transducer with rotation output
2. Capacitive sensor for micropositioning in two dimensions
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4. A capacitance based ultra-precision spindle error analyser
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3. Differential readings of capacitance-based controls of attitude and displacements at the micro/nano scale;Measurement Science and Technology;2020-07-30
4. The capacitive proximity sensor based on transients in RC-circuits;IOP Conference Series: Materials Science and Engineering;2018-05
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