Setup of a high-precision profilometer and comparison of tactile and optical measurements of standards
Author:
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Link
http://stacks.iop.org/0957-0233/25/i=4/a=044016/pdf
Reference15 articles.
1. Industrial Metrology
2. An atomic force microscope for the study of the effects of tip–sample interactions on dimensional metrology
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