A novel pitch evaluation of one-dimensional gratings based on a cross-correlation filter
Author:
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Link
http://stacks.iop.org/0957-0233/25/i=4/a=044007/pdf
Reference16 articles.
1. Atomic force microscope cantilevers as encoder for real-time displacement measurements
2. A prototype optical encoder system with nanometer measurement capability
3. Optical heterodyne grating interferometry for displacement measurement with subnanometric resolution
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