A micromachined silicon-based probe for a scanning near-field optical microscope on-chip-Reference-Cited by-同舟云学术

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A micromachined silicon-based probe for a scanning near-field optical microscope on-chip

Published:2005-11-25 Issue:1 Volume:17 Page:32-37
ISSN:0957-0233
Container-title:Measurement Science and Technology
language:
Short-container-title:Meas. Sci. Technol.

Author:

Bargiel Sylwester,Heinis Dominique,Gorecki Christophe,Górecka-Drzazga Anna,Dziuban Jan A,Józwik Michał

Publisher

IOP Publishing

Subject

Applied Mathematics,Instrumentation,Engineering (miscellaneous)

Reference21 articles.

1. VLSI-NEMS chip for parallel AFM data storage

2. Fabrication of a pencil-shaped fiber probe for near-field optics by selective chemical etching

3. Nonuniform silicon oxidation and application for the fabrication of aperture for near-field scanning optical microscopy

4. Mold-type SiC emitters with nanoholes at the apex

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1. Dielectric-metal-dielectric nanotip for SNOM;SPIE Proceedings;2009-05-07

2. High resolution SNOM probes;16th Polish-Slovak-Czech Optical Conference on Wave and Quantum Aspects of Contemporary Optics;2008-12-12

3. AlN as an actuation material for MEMS applications;Sensors and Actuators A: Physical;2008-02

4. Corrugated SNOM probe with enhanced energy throughput;Opto-Electronics Review;2008-01-01

5. Fabrication, caractérisation et modélisation de micropoutres multimorphes intégrant un film piézoélectrique d'AlN comme actionneur;Mécanique & Industries;2007-05

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