Phase step measurement and variable step algorithms in phase-shifting interferometry
Author:
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Link
http://stacks.iop.org/0957-0233/3/i=10/a=003/pdf
Reference9 articles.
1. Digital Wavefront Measuring Interferometer for Testing Optical Surfaces and Lenses
2. Phase shifter calibration in phase-shifting interferometry
3. Effect of piezoelectric transducer nonlinearity on phase shift interferometry
4. Digital phase-shifting interferometry: a simple error-compensating phase calculation algorithm
5. Digital wave-front measuring interferometry: some systematic error sources
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