Two-way frequency-conversion phase measurement for high-speed and high-resolution heterodyne interferometry
Author:
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Reference10 articles.
1. Sub-micron position measurement and control on precision machine tools with laser interferometry
2. Recent advances in displacement measuring interferometry
3. High-resolution, high-speed, low data age uncertainty, heterodyne displacement measuring interferometer electronics
4. Dual mode phase measurement for optical heterodyne interferometry
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2. Direct phase determination using simple phase lock loop for heterodyne displacement-measuring interferometers;Optical Metrology and Inspection for Industrial Applications V;2018-11-06
3. Simple digital phase-measuring algorithm for low-noise heterodyne interferometry;Measurement Science and Technology;2016-06-23
4. High-speed high-resolution heterodyne interferometer using a laser with low beat frequency;Applied Optics;2015-12-22
5. Low-noise front-end electronics for detection of intermediate-frequency weak light signals;Ninth International Symposium on Precision Engineering Measurement and Instrumentation;2015-03-06
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