A high-resolution displacement sensor based on a grating interferometer with the phase modulation technique
Author:
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Link
http://stacks.iop.org/0957-0233/23/i=10/a=105102/pdf
Reference11 articles.
1. High-resolution, high-speed, low data age uncertainty, heterodyne displacement measuring interferometer electronics
2. Heterodyne interferometer for measurement of in-plane displacement with subnanometer resolution
3. A High Performance Doppler Interferometer for Advanced Optical Storage Systems
4. Polarization interferometer for measuring small displacement
5. High-accuracy translation–rotation encoder with two gratings in a Littrow mount
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