High speed 3D surface profile without axial scanning: dual-detection confocal reflectance microscopy
Author:
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Link
http://stacks.iop.org/0957-0233/25/i=12/a=125403/pdf
Reference20 articles.
1. Novel approach to optical profiler with gradient focal point methods
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