Measuring large step heights by variable synthetic wavelength interferometry
Author:
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Reference9 articles.
1. Dual-wavelength heterodyne differential interferometer for high-precision measurements of reflective aspherical surfaces and step heights
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3. High-accuracy absolute distance measurement by means of wavelength scanning heterodyne interferometry
4. Absolute interferometry with a 670-nm external cavity diode laser
5. Measurement of absolute distance employing a tunable CW dye laser
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