Traceable measurement of nanoparticle size using a scanning electron microscope in transmission mode (TSEM)
Author:
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Link
http://stacks.iop.org/0957-0233/22/i=9/a=094002/pdf
Reference22 articles.
1. STEM Imaging of Lattice Fringes and beyond in a UHR In-Lens Field-Emission SEM
2. Application of transmission electron detection to SCALPEL mask metrology
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5. Multi-wavelength VIS/UV optical diffractometer for high-accuracy calibration of nano-scale pitch standards
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