An Introduction to Microelectromechanical Systems Engineering
Author:
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Cited by 23 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Enhanced Electrothermal Analysis for Acetone Gas Detection Based on PolyMUMPs MEMS Sensor;IEEE Access;2024
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4. Si-based MEMS resonant sensor: A review from microfabrication perspective;Microelectronics Journal;2021-12
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