Highly accurate non-contact characterization of engineering surfaces using confocal microscopy
Author:
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Link
http://stacks.iop.org/0957-0233/9/i=7/a=023/pdf
Reference21 articles.
1. Memoir on inventing the confocal scanning microscope
2. Experimental observations of the depth-discrimination properties of scanning microscopes
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