Decoupling criterion based on limited energy loss condition for groove measurement using optical scanning microscopes-Reference-Cited by-同舟云学术

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Decoupling criterion based on limited energy loss condition for groove measurement using optical scanning microscopes

Published:2016-11-02 Issue:12 Volume:27 Page:125014
ISSN:0957-0233
Container-title:Measurement Science and Technology
language:
Short-container-title:Meas. Sci. Technol.

Author:

Liu Jian,Li Mengzhou,Li Qiang,Tan Jiubin

Funder

National Nature Science Foundation of China

Fundamental Researches Program for Defence Industry

National Major Scientific Instrument and Equipment Development Project

Publisher

IOP Publishing

Subject

Applied Mathematics,Instrumentation,Engineering (miscellaneous)

Link

http://stacks.iop.org/0957-0233/27/i=12/a=125014/pdf

Reference17 articles.

1. The measurement and prevention of erosion and abrasion

2. Design and fabrication of a diffractive optical element for the objective lens of a small form factor optical data storage device

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