Non-contact precision profile measurement to rough-surface objects with optical frequency combs
Author:
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Link
http://stacks.iop.org/0957-0233/27/i=12/a=124002/pdf
Reference13 articles.
1. Absolute Measurement of Baselines up to 403 m Using Heterodyne Temporal Coherence Interferometer with Optical Frequency Comb
2. Femtosecond laser pulses for fast 3-D surface profilometry of microelectronic step-structures
3. Multi-gigahertz frequency comb-based interferometry using frequency-variable supercontinuum generated by optical pulse synthesizer
4. Frequency-comb-referenced two-wavelength source for absolute distance measurement
5. Absolute distance measurement using the frequency comb of a femtosecond laser
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