Improved RF-driven probe method for RF discharge plasma diagnostics-Reference-Cited by-同舟云学术

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Improved RF-driven probe method for RF discharge plasma diagnostics

Published:1991-08-01 Issue:8 Volume:2 Page:801-806
ISSN:0957-0233
Container-title:Measurement Science and Technology
language:
Short-container-title:Meas. Sci. Technol.

Author:

Ohsawa A,Ohuchi M,Kubota T

Publisher

IOP Publishing

Subject

Applied Mathematics,Instrumentation,Engineering (miscellaneous)

Reference17 articles.

1. The Theory of Collectors in Gaseous Discharges

2. Notes on the Effect of Noise on Langmuir Probe Characteristics

3. Effect of a R.F, signal on the characteristic of a langmuir probe

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2. Self-compensated standing wave probe for characterization of radio-frequency plasmas;Review of Scientific Instruments;2014-06

3. Diagnosis of the Argon Plasma in a PECVD Coating Machine;Plasma Science and Technology;2008-12

4. Reflections on electrical probes;Plasma Sources Science and Technology;2008-11-14

5. On the reliability of low-pressure dc glow discharge modelling;Plasma Sources Science and Technology;2006-02-22

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