Development of a sinusoidal phase-shifting self-mixing interferometer for real-time displacement measurement with nanometer accuracy
Author:
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Link
http://stacks.iop.org/0957-0233/24/i=5/a=055011/pdf
Reference19 articles.
1. Analysis of optical interferometric displacement detection in nanoelectromechanical systems
2. Optical metrology of micro- and nanostructures at PTB: status and future developments
3. Dimensional Micro and Nano Metrology
4. Laser diode self-mixing technique for sensing applications
5. Self-mixing differential vibrometer based on electronic channel subtraction
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