Surface profilometry with a fibre optical confocal scanning microscope
Author:
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Reference12 articles.
1. Three-dimensional surface measurement using the confocal scanning microscope
2. Application Of Confocal Beam Scanning Microscopy To The Measurement Of Submicron Structures
3. High-speed surface measurement using a nonscanning multiple-beam confocal microscope
4. Surface profile measurement using a unique microtube-based system
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