A 2D nano-positioning system with sub-nanometric repeatability over the millimetre displacement range
Author:
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Reference26 articles.
1. Nanomanipulation in a scanning electron microscope
2. An angstrom-positioning system using a twist-roller friction drive
3. Estimation and correction method for the two-dimensional positionerrors of a planar XY stage based on motion error measurements
4. Measurement of multi-degree-of-freedom error motions of a precision linear air-bearing stage
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