Laser scanner and diffraction pattern detection: a novel concept for dynamic gauging of fine wires
Author:
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Link
http://stacks.iop.org/0957-0233/6/i=5/a=003/pdf
Reference10 articles.
1. Half-micrometer linewidth metrology
2. Non-Contact Measurement Using A Laser Scanning Probe
3. High-speed noncontact fiber-diameter measurement using forward light scattering
4. High-speed high-resolution fiber diameter variation measurement system
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