Curved surface measurement method using chromatic confocal sensor and tilt scanning

Abstract

Abstract Large measurement ranges and curvature changes are characteristics of curved surfaces, making it difficult to measure their topography. In this study, a four-axis measurement system is developed, and a tilt scanning measurement method using a chromatic confocal sensor is proposed to measure curved surfaces. The measurement area is divided into different parts, in which the tilt scanning measurement is performed with different angles of the chromatic confocal sensor. After the scanning, the complete measurement data are restored by data processing and stitching. Compared with conventional scanning methods, the proposed method greatly expands the measurement range. Finally, the effectiveness of the developed measurement system and the tilt scanning measurement method is clearly verified by measuring a spherical specimen with a radius of 50 mm.