Correlational study of multiscale analysis and the metrological characteristics of areal surface topography measuring instruments

Abstract

Abstract With the metrological characteristics, an effective framework for the calibration, adjustment, performance specification and verification of areal surface topography measuring instruments has been introduced. The characteristics have been thoroughly researched and analyzed for their different applications. Each characteristic provides specific information for a certain axis or feature of the measuring instrument. This enables an uncertainty estimation and a comparability of different measuring instruments. In this study, the comparison results of metrological characteristics are correlated with information obtained from multiscale analysis. With this examination it can be shown that both, metrological characteristics and multiscale analysis include significant information about transfer behaviors of surface structures, which can be applied advantageously for a calibration, performance verification and uncertainty determination of areal surface topography measuring instruments.