Structural and morphological properties of TiN deposited by magnetron sputtering
Author:
Publisher
IOP Publishing
Subject
Materials Chemistry,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation
Link
http://iopscience.iop.org/article/10.1088/2051-672X/aae405/pdf
Reference47 articles.
1. Mechanical properties of titanium nitride films obtained by reactively sputtering with hot target
2. Influence of coating thickness on the morphology of TiC particles
3. Structural and mechanical properties of CVD deposited titanium aluminium nitride (TiAlN) thin films
4. Scratch Wear Resistance of TiALN And AlCrN Coated EN-353 Steel
5. Surface-interface microstructures and binding strength of cathodic arc ion plated TiCN coatings on YT14 cutting tools
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