Author:
Shao Shangkun,Li Huiquan,Yuan Tianyu,Sun Xuepeng,Hua Lu,Liu Zhiguo,Sun Tianxi
Abstract
Abstract
A glancing incident X-ray fluorescence (GIXRF) spectrometry using a single-bounce parabolic capillary (SBPC) was proposed for the analysis of layered samples. The divergence of the X‐ray beam was 0.33 mrad. In this paper, we used this instrumental setup to analyze Si single crystal and a 50 nm HfO2 single layer film deposited on a Si substrate.
Subject
General Physics and Astronomy
Cited by
2 articles.
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