Realization of conformal doping on multicrystalline silicon solar cells and black silicon solar cells by plasma immersion ion implantation
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Link
https://iopscience.iop.org/article/10.1088/1674-1056/23/11/118801/pdf
Reference21 articles.
1. Higher emitter quality by reducing inactive phosphorus
2. High-Throughput Ion-Implantation for Low-Cost High-Efficiency Silicon Solar Cells
3. Annealing, Passivation and Contacting of Ion Implanted Phosphorus Emitter Solar Cells
4. High Throughput Ion-Implantation for Silicon Solar Cells
5. High quality ion implanted boron emitters in an interdigitated back contact solar cell with 20% efficiency
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Solar‐grade boron emitters by BF 3 plasma doping and role of the co‐implanted fluorine;Progress in Photovoltaics: Research and Applications;2015-11-19
2. Boron implanted emitter for n-type silicon solar cell;Chinese Physics B;2015-02-26
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