Suppressing the mechanical quadrature error of a quartz double-H gyroscope through laser trimming
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Link
https://iopscience.iop.org/article/10.1088/1674-1056/22/11/117901/pdf
Reference20 articles.
1. SOI rate gyro sensor for automotive control
2. A parametrically amplified MEMS rate gyroscope
3. Common design techniques for BEI GyroChip quartz rate sensors for both automotive and aerospace/defense markets
4. A Z-axis Quartz Cross-fork Micromachined Gyroscope Based on Shear Stress Detection
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