Electronic and Thermal Properties of Ag-Doped Single Crystal Zinc Oxide via Laser-Induced Technique

Abstract

Abstract The doping of ZnO has attracted lots of attention because it is an important way to tune the properties of ZnO. Post-doping after growth is one of the efficient strategies. Here, we report a unique approach to successfully dope the single crystalline ZnO with Ag by the laser-induced method, which can effectively further post-treat grown samples. Magnetron sputtering was used to coat the Ag film with a thickness of about 50 nm on the single crystalline ZnO. Neodymium-doped yttrium aluminum garnet (Nd: YAG) laser was chosen to irradiate the Ag-capped ZnO samples, followed by annealing at 700℃ for two hours to form ZnO:Ag. The 3D information of the elemental distribution of Ag in ZnO was obtained through time-of-flight secondary ion mass spectrometry (TOF-SIMS). TOF-SIMS and core-level X-ray photoelectron spectroscopy (XPS) demonstrated that the Ag impurities could be effectively doped into single crystalline ZnO samples as deep as several hundred nanometers. Obvious broadening of core level XPS profiles of Ag from the surface to depths of hundred nms was observed, indicating the variance of chemical state changes in laser-induced Ag-doped ZnO. Interesting features of electronic mixing states were detected in the valence band XPS of ZnO: Ag, suggesting the strong coupling or interaction of Ag and ZnO in the sample rather than their simple mixture. The Ag-doped ZnO also showed a narrower bandgap and a decrease in thermal diffusion coefficient compared to the pure ZnO, which would be beneficial to thermoelectric performance.