Fabrication and characterization of all-Nb lumped-element Josephson parametric amplifiers*

Abstract

Josephson parametric amplifiers (JPAs) with nearly quantum-limited noise performance have become indispensable devices for the measurements of superconducting quantum information. We have developed an all-Nb lumped-element flux-driven JPA operating in the three-wave mixing mode. Our Nb-based JPA comprises Nb/Al-AlO x /Nb Josephson junctions, a parallel-plate capacitor with SiO2 dielectric sandwiched between two Nb layers, a bottom coplanar waveguides layer, and a top Nb wiring layer. We experimentally demonstrate a 20 dB gain over a 190 MHz bandwidth, a mean 1 dB compression of –123 dBm, and near quantum-limited noise performance. This fabrication process can be further used to design impedance transformed parametric amplifiers for multiple-qubit readout.