A fast solver of plasma fluid model in dielectric-barrier-discharge simulation
Author:
Funder
Japan Society for the Promotion of Science
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Link
https://iopscience.iop.org/article/10.1088/1361-6595/ab9b18/pdf
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1. Atmospheric Pressure Low Temperature Direct Plasma Technology: Status and Challenges for Thin Film Deposition
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