Concentric double hollow grid cathode discharges. Spectral investigations and phenomenological approach

Abstract

Abstract A discharge plasma is created by simultaneously biasing two concentric spherical grids with axisymmetric orifices. In this geometry, space charge structures in the form of multiple quasi-spherical luminous plasma bodies appear simultaneously inside and around the cathodes. The plasma formations are highly interdependent supplying each other with the particle flow and current closure necessary for the maintenance of the discharge. To diagnose these structures, space-resolved cold Langmuir probe measurements and optical emission spectroscopy investigations were performed in the axial direction allowing for the mapping of the axial profiles of plasma potential, electron temperature and density, ion density and optical emission. The existence of an accelerating double layer in the vicinity of the holes has been confirmed here, and in previous research (Teodorescu-Soare C T et al 2016 Phys. Scr. 91 034002; Schrittwieser R W et al 2017 Phys. Scr. 92 044001; Teodorescu-Soare C T et al 2019 Int. J. Mass Spectrom. 436 83). Besides the assessment of the relationship between discharge conditions and plasma parameters in the novel cathode system, the importance of a multiple concentric cathode discharge configuration is revealed for deposition applications.