Two-resonance probe for measuring electron density in low-pressure plasmas
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Link
http://stacks.iop.org/0963-0252/26/i=4/a=045015/pdf
Reference29 articles.
1. Development of internal-antenna-driven large-area RF plasma sources using multiple low-inductance antenna units
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5. Effect of an inhomogeneous electron density profile on the transmission microwave frequency spectrum of the cutoff probe;Plasma Sources Science and Technology;2020-12-01
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