Correlated mode analysis of a microwave driven ICP source
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Link
http://iopscience.iop.org/article/10.1088/1361-6595/ab06a7/pdf
Reference21 articles.
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1. The Nonlinear Behaviour of the Microwave Driven ICP Source;2023 IEEE International Conference on Plasma Science (ICOPS);2023-05-21
2. Temperature dependence of the complex permittivity in microwave range of some industrial polymers;AIP Advances;2022-10-01
3. Modelling of a miniature microwave driven nitrogen plasma jet and comparison to measurements;Plasma Sources Science and Technology;2021-06-01
4. Review and current status: E ⇌ H mode transition in low-temperature ICP and related electron dynamics;Plasma Sources Science and Technology;2021-02-01
5. Theoretical investigation of a miniature microwave driven plasma jet;Plasma Sources Science and Technology;2020-06-01
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