Investigation of carbon ionization in HiPIMS discharge with a hollow cathode magnetron-Reference-Cited by-同舟云学术

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Investigation of carbon ionization in HiPIMS discharge with a hollow cathode magnetron

Published:2021-06-14 Issue: Volume: Page:
ISSN:0963-0252
Container-title:Plasma Sources Science and Technology
language:
Short-container-title:Plasma Sources Sci. Technol.

Author:

Poluektov Nikolay P^ORCID,Usatov Igor,Kladov Maxim

Publisher

IOP Publishing

Subject

Condensed Matter Physics

Link

https://iopscience.iop.org/article/10.1088/1361-6595/ac0b2a/pdf

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. On the role of helium metastable (2³S₁) measured by time resolved tunable diode laser spectroscopy in high current magnetron discharge;Plasma Sources Science and Technology;2022-12-01

2. Effects of racetrack magnetic field strength on structure and properties of amorphous carbon coatings deposited by HiPIMS using deep oscillation pulses;Surface and Coatings Technology;2022-05

3. Behavior of high current density pulsed magnetron discharge with a graphite target;Plasma Sources Science and Technology;2021-12-01

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