Theoretical study of dissociative recombination and vibrational excitation of the ${\mathrm{BF}}_{2}^{+}$ ion by an electron impact
Author:
Funder
USPC
National Science Foundation
La Région Haute-Normandie
Labex-EMC3
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Link
http://stacks.iop.org/0963-0252/27/i=11/a=115007/pdf
Reference19 articles.
1. Preparation of Boron Carbide from BF3 and BCl3 in Hydrogen Plasma of Arc RF Discharge
2. Low-Energy Ion-Assisted Deposition of Boron Nitride Films in Surface-Wave Plasma
3. Plasma Implantation Technology for Upcoming Ultra Shallow and Highly Doped Fully Depleted Silicon On Insulator Transistors
4. Plasma immersion ion implantation for sub-22 nm node devices: FD-SOI and Tri-Gate
5. Low-cost plasma immersion ion implantation doping for Interdigitated back passivated contact (IBPC) solar cells
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