Combined ns pulsed-RF excitation and impedance matching considerations for the production of moderate E/n atmospheric pressure discharges for gas conversion

Abstract

Abstract Sub-breakdown radiofrequency (RF) discharges enabled by a nanosecond (ns) pulse ignition source are studied at atmospheric pressure in a range of gas mixtures from completely inert (in Ar) to completely reactive (in CO2). An electrical characterisation of the continuous wave (CW) RF discharge (13.56 MHz) is performed to determine plasma impedance and plasma power dissipation. Two different measurement methods to electrically characterize the system are described and compared. One method uses in-situ measurements of discharge parameters (voltage, current and the phase angle), and the other method performs ex-situ measurements of the load circuit using a vector network analyser. It was found that RF plasma power deposition depended on the applied RF power as well as the gas mixture composition. Using the in-situ voltage, current and phase angle measurements, plasma power deposition was calculated to be as much as 85% and 76% of the applied RF power for the pure Ar and pure CO2 cases, respectively. A preliminary qualitative assessment of the plasma composition was performed by optical emission spectroscopy, and CO2 conversion by mass spectrometry. CO2 to CO conversions of 11.2% and 5.5% in a 20:80 (CO2:Ar) mixture and in 100% CO2, respectively, were observed. This study demonstrates a RF plasma source for gas conversion applications at atmospheric pressure in a completely reactive gas.