Electron temperature measurements with a hairpin resonator probe in a pulsed low pressure capacitively coupled plasma
-
Published:2021-06-01
Issue:6
Volume:30
Page:065018
-
ISSN:0963-0252
-
Container-title:Plasma Sources Science and Technology
-
language:
-
Short-container-title:Plasma Sources Sci. Technol.
Author:
Peterson DORCID,
Xiao Y,
Ford K,
Kraus P,
Shannon SORCID
Subject
Condensed Matter Physics
Cited by
3 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献