Electric field reversals resulting from voltage waveform tailoring in Ar/O2 capacitively coupled plasmas sustained in asymmetric systems
Author:
Funder
U.S. Department of Energy, Office of Science, Office of Fusion Energy Sciences
US National Science Foundation
Samsung Electronics Ltd.
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Link
https://iopscience.iop.org/article/10.1088/1361-6595/ac14a7/pdf
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