Abstract
Abstract
The miniaturization of electronic devices and power systems requires the fabrication of functional components in the form of micrometer-sized thick films. A major challenge is the integration of functional ceramics with metals, which are considered incompatible with high-temperature ceramic processing. To overcome the integration barrier, an aerosol deposition (AD) spray-coating method based on room temperature deposition can be used. By employing the AD method, we were able to deposit relaxor-ferroelectric 0.65Pb(Mg1/3Nb2/3)O3–0.35PbTiO3 ceramic thick films on low-cost stainless-steel substrates. The as-deposited films were dense, with ∼97% of the theoretical density. Moreover, the post-deposition annealing at 500 °C did not result in any microstructural changes. Compared to the as-deposited films, the annealed films exhibit improved energy storage and electromechanical properties. The annealed thick films achieve a recoverable energy density of 15.1 J⋅cm−3 at an electric field of 1350 kV⋅cm−1 and an electric-field cycling stability of 5 million cycles. A piezoelectric response was detected through the entire film thickness by piezoelectric force microscopy. Macroscopic displacement measurements revealed a maximum relative strain of 0.38% at 1000 kV⋅cm−1, corresponding to inverse effective piezoelectric coefficient of ∼40 pm⋅V−1. In this study, we overcame the integration challenges and demonstrated the multifunctionalization of future ceramic-metal structures, as the deposited thick films on stainless steel exhibit energy storage capability and piezoelectric properties.
Funder
JSI ULTRACOOL
Slovenian Research Agency
Subject
Materials Chemistry,General Energy,Materials Science (miscellaneous)
Cited by
9 articles.
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