Abstract
Abstract
The atomic force microscope tip-based mechanical machining technique has been used to fabricate complex micro-structures successfully. However, the machining scope and depth are limited, which holds back this technique severely. This work presents the design and evaluation of a piezoelectric manufacturing system (PMS) for implementation of cross-scale (large scale and high resolution) plane micro-scratching. The PMS has the two-dimensional (2D) micro-machining ability with depths up to 0.98 μm in the millimeter machining scope through the combination of a travel range XY positioning stage and a three-degree-of-freedom (3-DOF) sandwich piezoelectric manipulator. The tracing property of the PMS is feasible for large scale machining by controlling the multi-axis cooperative motion of the 2-DOF stage. The experiments show that the micro-triangles and micro-circles arrays with dimensions from 40 μm to 400 μm are machined successfully. The deviations of the position determination and machined depths for all the micro-structures are less than 5%. Further, it is verified that the manipulator has potential to be used in vibration-assisted cutting to improve machining quality. To sum up, the PMS shows great prospects in the applications of machining cross-scale and large depth planar micro-structures.
Funder
China Postdoctoral Science Foundation
National Natural Science Foundation of China
Fundamental Research Funds for the Central Universities
Subject
Electrical and Electronic Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science,Atomic and Molecular Physics, and Optics,Civil and Structural Engineering,Signal Processing
Cited by
1 articles.
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