Abstract
Abstract
Three-degree-of-freedom (3-DOF) rotary piezoelectric motors often suffer from low positioning accuracy, complex excitation signals, and uneven preloading, limiting their application in precision drive systems. To address these issues, this study proposes a novel multi-drive pattern 3-DOF rotary piezoelectric motor, comprising a sandwich-type hollow cylindrical stator, a spherical rotor, and a pre-tightening structure. The proposed motor can operate in both inertial and traveling wave drive patterns. In the inertial drive pattern, the first-order and the third-order bending vibration modes of the stator are simultaneously excited by a sawtooth wave signal, generating a saw-tooth displacement on its driving feet to rotate the rotor around the x or y-axis. In the traveling wave drive pattern, two mutually orthogonal first-order bending vibration modes of the stator are simultaneously stimulated by two sinusoidal signals, generating a traveling wave on its driving feet to rotate the rotor around the z-axis. Initially, finite element analysis is used to simulate the operating principle of the stator and determine its geometric dimensions. Subsequently, a prototype of the sandwich-type hollow cylindrical stator is fabricated, and its vibration characteristics are tested to confirm the validation of the proposed operating principle and the correctness of the finite element simulation. Finally, a prototype of the proposed 3-DOF rotary piezoelectric motor is assembled, and its mechanical output characteristics are experimentally evaluated. Experimental results indicate that when the excitation voltage is 200 Vpp, the no-load rotary velocities of the motor prototype in three rotation directions are 79 r min−1, 76 r min−1, and 101 r min−1, respectively, start/stop response times are 10 ms/8.6 ms, 13.4 ms/6.2 ms, and 15.5 ms/7.7 ms, respectively, and the angular displacement resolutions are 7.4 μrad, 8 μrad, and 11.4 μrad, respectively. The proposed motor exhibits high mechanical integration, 3-DOF rotation, few excitation signals, adjustable pre-tightening force, and high positioning accuracy advantages, holding the potential applications in fields such as robotic technology and space pointing mechanisms.
Funder
National Key Research and Development Program of China
Natural Science Foundation of Jiangsu Province
National Natural Science Foundation of China
Subject
Electrical and Electronic Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science,Atomic and Molecular Physics, and Optics,Civil and Structural Engineering,Signal Processing
Cited by
2 articles.
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