Electrohydrodynamic jet printed bioinspired piezoelectric hair-like sensor for high-sensitivity air-flow detection
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Published:2023-08-10
Issue:9
Volume:32
Page:095020
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ISSN:0964-1726
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Container-title:Smart Materials and Structures
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language:
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Short-container-title:Smart Mater. Struct.
Author:
Wang DazhiORCID,
Li Yikang,
Hu Xin,
Lu Liangkun,
Xu Pengfei,
Chen Xiangji,
Liu Chang,
Wang Lunxiang,
Liu Ben,
Suo Liujia,
Cui Yan,
Liang Junsheng
Abstract
Abstract
Inspired by the highly sensitive hairs of creatures in nature, this work proposes a high-aspect-ratio piezoelectric sensor that is processed using electrohydrodynamic jet (E-jet) printing technology. A thin layer of piezoelectric material is directly written on the surface of tungsten steel microwire by E-jet printing. The piezoelectric material was crystallized by high-temperature annealing and fully bonded to the microwire. The annealed piezoelectric thin film was then sputtered with copper electrodes which forms a piezoelectric hair-like sensor with a diameter of 120 μm and an aspect ratio of 300. It was observed that the piezoelectric hair-like sensor generates 18 mV with a displacement of 100 μm. The output signal increases linearly with the increase of lateral displacement and velocity. It was examined that the piezoelectric hair-like sensor can detect airflow velocity as low as 0.01 m s−1, which shows a lower detection threshold compared to piezoelectric hair-like airflow sensors processed in other ways. In addition, the piezoelectric hair-like sensor allows for the detection of an airflow velocity of 10 m s−1 and a response time of 70 ms. The experimental results show that the piezoelectric hair-like sensor has high sensitivity, a wide detection range and rapid detection response, which is expected to be a high-performance sensor for biosensing and airflow monitoring.
Funder
Ningbo Institute of Dalian University of Technology
National Key R&D Program of China
National Natural Science Foundation of China
Fundamental Research Funds for the Central Universities
Subject
Electrical and Electronic Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science,Atomic and Molecular Physics, and Optics,Civil and Structural Engineering,Signal Processing
Cited by
1 articles.
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