Direct laser writing regimes for bulk inscription of polarization-based spectral microfilters and fabrication of microfluidic bio/chemosensor in bulk fused silica

Abstract

Abstract Laser inscription of form-birefringent nanograting layers inside fused silica by ultrashort (femto-picosecond) laser pulses at 515 nm was studied as a function of laser, average power and pulsewidth in terms of fabrication regimes. Retardance magnitudes were acquired for single birefringent layers inscribed at different laser parameters, enabling fabrication of polarization-based spectral micro-filters in the form of few-layer microdevices and of microfluidic multi-color refractive-index chemo/biosensor.