Synthesis and properties of CSxFythin films deposited by reactive magnetron sputtering in an Ar/SF6discharge-Reference-Cited by-同舟云学术

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Synthesis and properties of CSxFythin films deposited by reactive magnetron sputtering in an Ar/SF6discharge

Published:2017-04-05 Issue:19 Volume:29 Page:195701
ISSN:0953-8984
Container-title:Journal of Physics: Condensed Matter
language:
Short-container-title:J. Phys.: Condens. Matter

Author:

Lai Chung-Chuan,Goyenola Cecilia,Broitman Esteban,Näslund Lars-Åke,Högberg Hans,Hultman Lars,Gueorguiev Gueorgui K,Rosen Johanna

Funder

Swedish Foundation for Strategic Research (SSF) Synergy Grant

Swedish Government Strategic Research Area in Materials Science on Functional Materials

VINN Excellence Centre (Swedish Agency for Innovation Systems VINNOVA)

Linköping Linnaeus Initiative on Novel Functionalized Materials (VR)

Publisher

IOP Publishing

Subject

Condensed Matter Physics,General Materials Science

Link

http://stacks.iop.org/0953-8984/29/i=19/a=195701/pdf

Reference52 articles.

1. Diamond-like amorphous carbon

2. Nanomechanical and nanotribological properties of carbon-based thin films: A review

3. Tribology of diamond-like carbon films: recent progress and future prospects

4. Growth of CNx/BN:C multilayer films by magnetron sputtering

5. Fullerene-like Carbon Nitride: A Resilient Coating Material

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