An analysis and preliminary experiment of the discharge characteristics of RF ion source with electromagnetic shielding

Abstract

Abstract Combined with two-dimensional (2D) and three-dimensional (3D) finite element analysis and preliminary experimental tests, the effects of size and placement of the electromagnetic shield of the radio-frequency (RF) ion source with two drivers on plasma parameters and RF power transfer efficiency are analyzed. It is found that the same input direction of the current is better for the RF ion source with multiple drivers. The electromagnetic shield (EMS) should be placed symmetrically around the drivers, which is beneficial for the plasma to distribute uniformly and symmetrically in both drivers. Furthermore, the bigger the EMS shield radius is the better generating a higher electron density. These results will be of guiding significance to the design of electromagnetic shielding for RF ion sources with a multi-driver.