On the electron sheath theory and its applications in plasma–surface interactions

Abstract

Abstract In this work, an improved understanding of electron sheath theory is provided using both fluid and kinetic approaches while elaborating on their implications for plasma–surface interactions. A fluid model is proposed considering the electron presheath structure, avoiding the singularity in electron sheath Child–Langmuir law which overestimates the sheath potential. Subsequently, a kinetic model of electron sheath is established, showing considerably different sheath profiles in respect to the fluid model due to non-Maxwellian electron velocity distribution function and finite ion temperature. The kinetic model is then further generalized and involves a more realistic truncated ion velocity distribution function. It is demonstrated that such a distribution function yields a super-thermal electron sheath whose entering velocity at the sheath edge is greater than the Bohm criterion prediction. Furthermore, an attempt is made to describe the electron presheath–sheath coupling within the kinetic framework, showing a necessary compromise between a realistic sheath entrance and the inclusion of kinetic effects. Finally, the secondary electron emissions induced by sheath-accelerated plasma electrons in an electron sheath are analysed and the influence of backscattering is discussed.